-
[1]
Lam N Q, Nguyyen T, Leaf G K et al. Nucl. Instr. Meth., 1988, B31(3): 415-424[2] Wang Zhenxia, Pan Jisheng, Zhang Jiping et al. Nucl. Instr. Meth., 1993, B74(3):380-384[3] Yacouit A M, Lam N Q. Nucl. Instr. Meth., 1992, B71(2): 148-154[4] Wang Zhenxia, Pan Jisheng, Zhang Jiping et al. Phys. Lett., 1993, A177(3):275-278[5] Karty A, GrutuweigGenossar J, Rudman P S. J. Appl. Phys., 1979, 50(11):7200-7207[6] Wang Zhenxia, Li Xinnian, Wang Chuashan. J. Mater Sci. Lett., 1995, 14:892-894[7] Behrisch(ed) R, Sputtering by Particle Bombardment, Vol. 11, (Springer, Heidelberg, 1983)