The PIC/MCC Simulation of the Ionizing Characters in Electron Cyclotron Resonance Discharge

JIN Xiao-Lin; YANG Zhong-Hai

Chinese Physics C> 2007, Vol. 31> Issue(S1) : 174-177

The PIC/MCC Simulation of the Ionizing Characters in Electron Cyclotron Resonance Discharge

JIN Xiao-Lin ^, ,
YANG Zhong-Hai

College of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China

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Abstract：
A theoretical and computational model is presented to study the ionization of the argon electron cyclotron resonance (ECR) microwave discharge using a quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method. The interaction between the charged particles and microwave fields are described by the electromagnetic mode of particle-in-cell method. The collision processes are treated with Monte Carlo method. The simulation code is the original work. The results of the particle simulation for the ECR discharge of argon gas which include the microscopic features of charged particles and the electromagnetic characteristics of the ECR discharge plasma, and also the transient phenomena have been presented.

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JIN Xiao-Lin and YANG Zhong-Hai. The PIC/MCC Simulation of the Ionizing Characters in Electron Cyclotron Resonance Discharge[J]. Chinese Physics C, 2007, 31(S1): 174-177.

JIN Xiao-Lin and YANG Zhong-Hai. The PIC/MCC Simulation of the Ionizing Characters in Electron Cyclotron Resonance Discharge[J]. Chinese Physics C, 2007, 31(S1): 174-177. shu

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Received: 2007-05-30
Revised: 1900-01-01

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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

The PIC/MCC Simulation of the Ionizing Characters in Electron Cyclotron Resonance Discharge

Corresponding author: JIN Xiao-Lin,

College of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China

Received Date: 2007-05-30

Accepted Date: 1900-01-01

Available Online: 2007-01-03

Abstract: A theoretical and computational model is presented to study the ionization of the argon electron cyclotron resonance (ECR) microwave discharge using a quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method. The interaction between the charged particles and microwave fields are described by the electromagnetic mode of particle-in-cell method. The collision processes are treated with Monte Carlo method. The simulation code is the original work. The results of the particle simulation for the ECR discharge of argon gas which include the microscopic features of charged particles and the electromagnetic characteristics of the ECR discharge plasma, and also the transient phenomena have been presented.

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The PIC/MCC Simulation of the Ionizing Characters in Electron Cyclotron Resonance Discharge

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