Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Wang Jun; Cui Mingqi; Xu Wenxuan; Huang Yuying; Wang Dewu; Liu Jianfei; Xian Dingchang

Chinese Physics C> 1994, Vol. 18> Issue(1) : 13-19

Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Institute of High Energy Physics,Beijing 100039

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Abstract：
W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared.

References

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Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method[J]. Chinese Physics C, 1994, 18(1): 13-19.

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Received: 1900-01-01
Revised: 1900-01-01

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沈阳化工大学材料科学与工程学院沈阳 110142

Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Corresponding author: Wang Jun,

Institute of High Energy Physics,Beijing 100039

Received Date: 1900-01-01
Accepted Date: 1900-01-01
Available Online: 1994-01-05

Abstract: W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared.