Studies on Wehnelt of Electron-Beam Accelerator

YIN Ming; ZHOU Xiao-Yan

Chinese Physics C> 2005, Vol. 29> Issue(3) : 301-304

Studies on Wehnelt of Electron-Beam Accelerator

YIN Ming ^, ,
ZHOU Xiao-Yan

School of Control Science and Engineering,Electron-Beam Laboratory,Shandong University,Jinan 250061,China2 School of Information Science and Engineering,Shandong University,Jinan 250061,China

Abstract
HTML
Reference
Related

PDF

Abstract：
Electron beam can be focused into a small spot with the diameter of only about nanometers theoretically,and easily controlled.It cannot be replaced by any other micro fabrication techniques in mask-making of VLSI (Very Large-Scale Integration).Based on the electron gun of SDS-3 electron beam lithography machine,the concave hyperboloid Wehnelt(oxide-coated cover)of accelerator is discussed.The electron trajectories and potential distribution are given.Electrons from the gun accelerated by a high voltage reached a target　of silicon piece(In front of the aperture)via the Wehnelt.Finally,spots of E-beam in the silicon piece and the geometry schematics for Wehnelt of accelerator are given.

References

[1]

. YIN Ming, SUN Xiao-jun. HEP NP, 2004, 28( 4) : 304 -307(in Chinese)(尹明,孙晓军,高能物理与核物理,2004, 28(4):304-307)2. WANG Jun-Hua, SHEN Lian-Guan, WANG Gui-Cheng et al . HEP NP, 2001, 25( 11) : 1120-1127 (in Chinese)(王绮华,沈连官,王贵诚等,高能物理与核物理,2001,25(11):1120-1127 )3. Yamagat e Y, Mihara S, Nishioki N. IEEE MEMS, 1996, 48: 307-3114. Dewolf P, Brazel E. Sol id Stat e Technology, 2000, 38( 9) : 117-1255. Bakharaen A A, Nurgazizon N I. Surface Science, 2001, 482-485:1319. 13246. ZHANG Yong-Hui , CHEN Hong-Bin, KANG Qiang.HEP NP, 2002,26( 8) : 876-879(in Chinese)(张永辉,陈洪斌,康强.高能物理与核物理, 2002, 26 ( 8 ) : 876-879)7. WANG Shu-Hong, WANG Jiu-Qing, YE Qiang. HEP NP, 2002, 26( 12) : 1302(in Chinese)(王书鸿,王九庆,叶强.高能物理rJJ核物理,2002,26(12):1302)8. Pfeiffer H C. Vac Sci Technology, 1999, B17( 11/ 12) : 2566-25769. Fritz. Sience, 2000, 288: 316-32210. Wada Y. Microelectronics, 1998, 29: 601-61111. YIN Ming, ZHANG Yu-lin. Acta Optica Sinica, 2004, 24 ( 3) : 423-426 (in Chinese)(尹明,张玉林.光学学报,2004,24(3):423-426 )

[1]	ZHAN Tian-Wen , LIU Jin-Liang , GE Bing , YIN Yi . Preliminary Research on Primary Energy Source of High Current Electron Beam Accelerator Based on Spiral Pulse Forming Line. Chinese Physics C, 2008, 32(S1): 295-297.
[2]	WEN Yong-Wu , WEN Xu , LIU Jian-Xin . Microwave System of Medical Standing Electron Linear Accelerator. Chinese Physics C, 2007, 31(7): 683-685.
[3]	CHEN Yan-Wei , WANG Shu-Hong , PEI Guo-Xi , LIU Wei-Bin , YE Qiang . Beam Commissioning of BEPCII Injector Linac. Chinese Physics C, 2006, 30(6): 562-565.
[4]	YANG Guo-Jun , ZHANG Zhuo , CHEN Si-Fu , XU Tie-Zheng , MU Fan , lijin , JIANG Xiao-Guo . Beam Measurement of Dragon-I Linear Induction Accelerator. Chinese Physics C, 2006, 30(S1): 105-107.
[5]	LI Zhi-Hui . Study of the Capacitance Coupling in Accelerators. Chinese Physics C, 2006, 30(7): 680-683.
[6]	LIU Hua-Chang , WANG Xiu-Long , FU Shi-Nian . Design Study on an Electron Linac for Irradiation Processing with a High Capture Efficiency. Chinese Physics C, 2006, 30(6): 581-586.
[7]	GU Peng-Da , GEN Zhe-Qiao , CUI Yan-Yan , PEI Guo-Xi , WANG Shu-Hong . Design Studies of RF Phasing System for BEPCII Linac. Chinese Physics C, 2005, 29(3): 316-320.
[8]	LONG Ji-Dong , LIN Yu-Zheng , LUO Fei , GU Zhuo-Wei , SHI Jin-Shui . Destruction Study of Tantalum Target Impacted by 12MeV Electron Beam. Chinese Physics C, 2004, 28(5): 564-568.
[9]	XING Qing-Zi , LIN Yu-Zheng , FU Shi-Nian , FANG Shou-Xian . Study of Simultaneous Acceleration of Positive and Negative Ion Beams by Dynamic Simulation in RFQ. Chinese Physics C, 2004, 28(6): 659-663.
[10]	XIE Jia-Lin , WANG Fa-Ya , YANG Xue-Ping , SHEN Bin , GU Wei , ZHANG Li-Wen . Proof-of-Principle Research on a Novel Compact Linac. Chinese Physics C, 2004, 28(2): 105-109.
[11]	WANG Fa-Ya . Design of Accelerating Structure on a Novel Compact Electron Linac. Chinese Physics C, 2004, 28(10): 1109-1115.
[12]	LI Jia-Cai¹ , WU Yuan-Ming¹ , CUI Xiang-Zong¹ , ZHANG Liang-Sheng¹ , ZHOU Bao-Qing¹ , LIU Zheng-Quan¹ , ZHANG Shao-Ping¹ , LIU Shi-Xing² , SUN Chang-Chun¹ , SHEN Ji² , YIN Ze-Jie² , ZHANG Yong-Ming<sup , , , , . A Test Beam Upgrade Based on the BEPC-LINAC. Chinese Physics C, 2004, 28(12): 1269-1277.
[13]	HUA Jian-Fei , HUO Yu-Kun , CAO Na , LIN Yu-Zheng . Output Characteristics of Electron Bunch Accelerated by Laser Pulse. Chinese Physics C, 2004, 28(3): 308-312.
[14]	XING Qing-Zi , FU Shi-Nian , LIN Yu-Zheng , FANG Shou-Xian . Calculation of Beam Acceptance for RFQ Accelerators. Chinese Physics C, 2003, 27(7): 628-632.
[15]	ZHANG Yong-Hui , CHEN Hong-Bin , KANG Qiang , CAO Shao-Yun , CHANG An-Bi . Development of Repetition Frequency Electron-Beam Generator Technology. Chinese Physics C, 2002, 26(8): 876-881.
[16]	OUYANG Hua-Fu , YU Qing-Chang . Study on the Section-Division of Superconducting Proton Linac. Chinese Physics C, 2001, 25(12): 1225-1230.
[17]	WANG ShuiQing . Calculation of the Electron Trajectory for 200kV Self-shielded Electron Accelerator. Chinese Physics C, 2000, 24(6): 573-577.
[18]	Zhou Linong , Zhang Mutian , Luo Zihua , Yu Qingchang , Kong Dengming , Qiao Jimin . Preliminary Design of a Dedicated Proton Therapy Linac. Chinese Physics C, 1998, 22(11): 1042-1049.
[19]	Chen Pengfei , Zhang Mingchao , Li Xinmin , Wang Yuhong . Research and Design of Electron Gun of Electrocurtain. Chinese Physics C, 1998, 22(6): 564-569.
[20]	Luo Zihua , Wang Shuhong . Design and Study of Beam Dynamics for the BPL-RFQ. Chinese Physics C, 1995, 19(7): 658-666.

Access

Get Citation

YIN Ming and ZHOU Xiao-Yan. Studies on Wehnelt of Electron-Beam Accelerator[J]. Chinese Physics C, 2005, 29(3): 301-304.

YIN Ming and ZHOU Xiao-Yan. Studies on Wehnelt of Electron-Beam Accelerator[J]. Chinese Physics C, 2005, 29(3): 301-304. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2004-06-21
Revised: 1900-01-01

Article Metric

Article Views(3333)
PDF Downloads(600)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Studies on Wehnelt of Electron-Beam Accelerator

Corresponding author: YIN Ming,

School of Control Science and Engineering,Electron-Beam Laboratory,Shandong University,Jinan 250061,China2 School of Information Science and Engineering,Shandong University,Jinan 250061,China

Received Date: 2004-06-21

Accepted Date: 1900-01-01

Available Online: 2005-03-05

Abstract: Electron beam can be focused into a small spot with the diameter of only about nanometers theoretically,and easily controlled.It cannot be replaced by any other micro fabrication techniques in mask-making of VLSI (Very Large-Scale Integration).Based on the electron gun of SDS-3 electron beam lithography machine,the concave hyperboloid Wehnelt(oxide-coated cover)of accelerator is discussed.The electron trajectories and potential distribution are given.Electrons from the gun accelerated by a high voltage reached a target　of silicon piece(In front of the aperture)via the Wehnelt.Finally,spots of E-beam in the silicon piece and the geometry schematics for Wehnelt of accelerator are given.

HTML

Reference (1)

Studies on Wehnelt of Electron-Beam Accelerator

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article