Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

LI Hai-Xia; LI Zhan-Kui; WANG Fang-Cong; WANG Zhu-Sheng; WANG Xiu-Hua; LI Chun-Yan

doi:10.1088/1674-1137/35/7/007

Chinese Physics C> 2011, Vol. 35> Issue(7) : 635-637 DOI: 10.1088/1674-1137/35/7/007

Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

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The annealing process for boron implantation is a crucial step during large size nuclear radiation detector fabrication. It can reduce the lattice defects and the projection straggling. A two-step annealing process for boron implantation was developed instead of a one-step annealing process, and the reverse body resistance of a silicon micro-strip detector was significantly increased, which means that the performance of the detector was improved.

References

[1]

O' Sullivan B J, Hurley P K, Leveugle C et al. J. Appl. Phys., 2001, 89(7): 38112 Santucci S, Guerrieri S, Passacantando M et al. J. Non-Crys. Solids, 2001, 280: 543 Briantseve T A, Lebedeva Z M, Lioubtchenko D V et al. Appl. Surf. Sci., 2000, 156: 214 Nobili D, Armigliato A, Finetti M, Solmi S. J. Appl. Phys., 1982, 53(3): 14845 Tamura M M. Mater. Sci. Rep., 1991, 6: 1416 Schreutelkamp R J, Custer J S, Liefting J R, LU W X, Saris F W. Mater. Sci. Rep., 1991, 6: 2757 Kim Y, Massoud H Z, Fair R. J. Electron. Mater., 1989, 18: 1438 Sands T, Washburn J, Myers E, Sadana D K. Nucl. In-strum. Methods B, 1985, 7: 3379 Seidel T E, Lischner D J, Pai C S, Knoell R V, Maher D M, Jacobson D C. Nucl. Instrum. Methods B, 1985, 7: 25110 Ajmera A C, Rozgonyi G A, Fair R B. Appl. Phys. Lett. J., 1988, 2: 813

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LI Hai-Xia, LI Zhan-Kui, WANG Fang-Cong, WANG Zhu-Sheng, WANG Xiu-Hua and LI Chun-Yan. Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process[J]. Chinese Physics C, 2011, 35(7): 635-637. doi: 10.1088/1674-1137/35/7/007

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Received: 2010-09-10
Revised: 2010-10-26

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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

Received Date: 2010-09-10

Accepted Date: 2010-10-26

Available Online: 2011-07-05

Abstract: The annealing process for boron implantation is a crucial step during large size nuclear radiation detector fabrication. It can reduce the lattice defects and the projection straggling. A two-step annealing process for boron implantation was developed instead of a one-step annealing process, and the reverse body resistance of a silicon micro-strip detector was significantly increased, which means that the performance of the detector was improved.

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Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

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Preparation of a silicon micro-strip nuclear radiation detector by a two-step annealing process

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