Design and experimental testing of a gas cluster ion accelerator

Xiao-Mei Zeng; Vasiliy Pelenovich Chuan-Sheng Liu; De-Jun Fu

doi:10.1088/1674-1137/41/8/087003

Chinese Physics C> 2017, Vol. 41> Issue(8) : 087003 DOI: 10.1088/1674-1137/41/8/087003

Design and experimental testing of a gas cluster ion accelerator

1.
Key Laboratory of Artificial Micro-and Nano-Materials of Ministry of Education and Hubei Nuclear Solid Physics Key Laboratory, School of Physics and Technology, Wuhan University, Wuhan 430072, China

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Abstract：
A gas cluster ion beam (GCIB) system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.
- gas cluster ion beam ,
- flow visualization ,
- cluster mass separation ,
- retarding electrode

References

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Xiao-Mei Zeng, Vasiliy Pelenovich Chuan-Sheng Liu and De-Jun Fu. Design and experimental testing of a gas cluster ion accelerator[J]. Chinese Physics C, 2017, 41(8): 087003. doi: 10.1088/1674-1137/41/8/087003

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Received: 2017-02-14
Revised: 2017-04-05

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Supported by International Cooperation Program of the Ministry of Science and Technology of China (2015DFR00720),Wuhan Municipal Science and Technology Bureau (2016030409020219),Suzhou Scientific Development Project (ZXG201448) and Hubei Province Technological Innovation Project (2016AHB004)

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Design and experimental testing of a gas cluster ion accelerator

Corresponding author: De-Jun Fu,

1. Key Laboratory of Artificial Micro-and Nano-Materials of Ministry of Education and Hubei Nuclear Solid Physics Key Laboratory, School of Physics and Technology, Wuhan University, Wuhan 430072, China

Received Date: 2017-02-14

Accepted Date: 2017-04-05

Available Online: 2017-08-05

Fund Project: Supported by International Cooperation Program of the Ministry of Science and Technology of China (2015DFR00720),Wuhan Municipal Science and Technology Bureau (2016030409020219),Suzhou Scientific Development Project (ZXG201448) and Hubei Province Technological Innovation Project (2016AHB004)

Abstract: A gas cluster ion beam (GCIB) system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.

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Design and experimental testing of a gas cluster ion accelerator

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