A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE

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MA MING-HSIU, YAO WEI and EAI KUEI-PEING. A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE[J]. Chinese Physics C, 1978, 2(6): 544-549.
MA MING-HSIU, YAO WEI and EAI KUEI-PEING. A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE[J]. Chinese Physics C, 1978, 2(6): 544-549. shu
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Received: 1978-03-23
Revised: 1900-01-01
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE

Abstract: This article describes a new type of radio-frequency metal ion source, which can be operated with gases, liquids and solids. The operating temperature of the ion source may reach 1000℃. Therefore we can extract ion beams of a considerable number of the elements including metal. At present, the ion beams of Al+, Mg+, Fe+, Cr+, Zn+, In+, Ag+, Cd+, Sn+, Sm+, Hg+, S+, P+, As+, Se+, Te+, etc. have been extracted. The total beam current ranges from several hundred microamperes to the order of milliamperes. The useful fraction of ion in total beam is 70—90%. The life of the source ranges from 40 to more than 100 hours.The basic structure and operating characteristics of the source are mainly discussed in this paper.

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