Research for a Clean and Large Throughput Differential Pumping System

MENG Jun; YANG Xiao-Tian; ZHANG Su-Ping; CHU Ji-Guo

Chinese Physics C> 2008, Vol. 32> Issue(S1) : 59-61

Research for a Clean and Large Throughput Differential Pumping System

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Abstract：
The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput, but also to achieve a clean system without back-oil. In the paper, the pressure in differential stages is calculated; the differential pumping system design and equipment choice are introduced; the tests of Molecular/Booster Pump (MBP), a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.

References

[1]

. Sechenkov A, Bruchle W. Modeling the Di erential Pump-ing of the TASCA Gas Vacuum System [J]. InstrumentsMethods, 2005 (GSI, Darmstadt, Germany)2. JIANG Di-Kui, LI Gui-He, LIU Ze-Xin et al. Vacuum Sci-ence and Technology, 1994(3): 174-178(in Chinese)(蒋迪奎, 李贵和, 刘泽新等. 真空科学与技术, 1994(3): 174-178)3. CHU Ji-Guo et al. Vacuum Science and Technology,2005(5): 394(in Chinese)(储继国等. 真空科学与技术学报, 2005(5): 394)4. ZHANG Su-Ping, YANG Xiao-Tian, CHU Ji-Guo et al.Beam E ect Analysis of Monte Carlo Method for Large-Aperture and Coaxial Di erential System. Proceeding ofChinese Vacuum Conference. 2006.116(in Chinese)(张素平, 杨晓天, 储继国等. 基于Monte Carlo方法对大孔径同轴差分系统束流效应分析[C]. 中国真空学会2006年学术会议论文摘要集, 116)

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MENG Jun, YANG Xiao-Tian, ZHANG Su-Ping and CHU Ji-Guo. Research for a Clean and Large Throughput Differential Pumping System[J]. Chinese Physics C, 2008, 32(S1): 59-61.

MENG Jun, YANG Xiao-Tian, ZHANG Su-Ping and CHU Ji-Guo. Research for a Clean and Large Throughput Differential Pumping System[J]. Chinese Physics C, 2008, 32(S1): 59-61. shu

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Received: 2008-01-10
Revised: 1900-01-01

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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Research for a Clean and Large Throughput Differential Pumping System

Corresponding author: MENG Jun,

Received Date: 2008-01-10

Accepted Date: 1900-01-01

Available Online: 2008-01-04

Abstract: The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput, but also to achieve a clean system without back-oil. In the paper, the pressure in differential stages is calculated; the differential pumping system design and equipment choice are introduced; the tests of Molecular/Booster Pump (MBP), a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.

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Research for a Clean and Large Throughput Differential Pumping System

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通讯作者: 陈斌, bchen63@163.com

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