Study on Lithium Fluoride Cluster-Based Nanophase Films by Low Energy Positron Beam
- Received Date: 1900-01-01
- Accepted Date: 1900-01-01
- Available Online: 1997-09-05
Abstract: Lithium fluoride(LiF) cluster-based films deposited on monocrystalline silicon with vaporzation/ condensation method have been studied by low energy positron beam and the S parameters and the effective lengths of diffusion (Leff) in position annihilation were measured. The influences on the microstructure of LiF cluster-based films by the conditions of preparation, such as the temperature of tho substrate, the rate of tho vaporization and the partial pressure of Ar are discussed.