Structure Fabrication of PI Film for GEM Detector

YI Fu-Ting; LUO Liang; ZHANG Ju-Fang; CHEN Yuan-Bai; XIE Yi-Gang; XIE Wan

Chinese Physics C> 2007, Vol. 31> Issue(10) : 929-932

Structure Fabrication of PI Film for GEM Detector

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China2 Graduate University of Chinese Academy of Sciences, Beijing 100049, China

Abstract
HTML
Reference
Related

PDF

Abstract：
GEM, which has rapidly been developed in recent years as a new type of gas detector, has advantages of high position resolution and counting rate with a wide potential application in particle physics and X-ray imaging and etc. One of the key techniques of GEM's development is the structure fabrication of the PI film for the detector, which is difficult to be done by the lithography process. In this paper we present the structure fabrication process of GEM's PI film, and the result of our work about it. We chose wet-etching and dry-etching to make the structure holes of PI film, and find that wet-etching is better way to get perfect holes of GEM's PI film for future application with acceptable price. The successful fabrication of GEM's film structures is helpful to develop the domestic research of GEM detector. The performance of the GEM detector with such PI film still need more detail study.

References

[1]

. Sauli F. A New Concept for Electron Ampli cation in GasDetectors. Nuclear Instrument and Methods, 1997, A386:531-5342. LAI Yong-Fang, LI Yu-Lan, LI Yuan-Jing et al. HEP NP, 2006, 30(8): 767-770(in Chinese)(来永芳，李玉兰，李元景等.高能物理与核物理，2006, 30(8):767-770)3. AN Shao-Hui, LI Cheng, XU Zi-Zhong et al. HEP NP,2004, 28(4): 412-416(in Chinese)(安少辉，李澄，许咨宗等.高能物理与核物理，2004, 28(4):412-416)4. Mormann D et al. GEM-based Gaseous Photonmultipliersfor UV and Visible Photon Imaging. Nuclear Instrumentand Methods, 2003, A504: 93-985. Vitor da Silva, Rui de Oliveira, David Watts et al. AnInnovative \ChemicalVia" Process for the Production ofHigh Density Interconnect Printed Circuit Boards, CircuitWorld., 2004, 30/4: 27-336. LI Cheng, SUN Yong-Jie, ZHOU Yi et al. HEP NP, 2005,29(1): 68-71(in Chinese) (李澄，孙勇杰，周意等.高能物理与核物理，2005, 29(1): 68-71)7. HAN Ji-Song et al. Three-dimensional Interconnect Technology on a Flexible Polyimide Film, J. Micromech. Microeng., 2004, 14: 38-48

[1]	Xu-Dong Ju , Ming-Yi Dong , Yi-Chen Zhao , Chuan-Xing Zhou , Qun Ou-Yang . Design and optimization of resistive anode for a two-dimensional imaging GEM detector. Chinese Physics C, 2016, 40(8): 086004. doi: 10.1088/1674-1137/40/8/086004
[2]	ZHANG Yu-Lian , QI Hui-Rong , HU Bi-Tao , FAN Sheng-Nan , WANG Bo , LIU Mei , ZHANG Jian , LIU Rong-Guang , CHANG Guang-Cai , LIU Peng , OUYANG Qun , CHEN Yuan-Bo , YI Fu-Ting . Investigation of GEM-Micromegas detector on X-ray beam of synchrotron radiation. Chinese Physics C, 2014, 38(4): 046001. doi: 10.1088/1674-1137/38/4/046001
[3]	XIE Wen-Qing , HUANG Meng , LI Ting , TIAN Yang , LI Yu-Lan , LI Yuan-Jing . Electron transmission efficiency of gating-GEM foil for TPC. Chinese Physics C, 2012, 36(4): 339-343. doi: 10.1088/1674-1137/36/4/008
[4]	ZHOU Jian-Rong , SUN Zhi-Jia , LIU Ben , WANG Yan-Feng , YANG Gui-An , ZHOU Liang , XU Hong , DONG Jing , YANG Lei , LI Yi . Neutron beam monitor based on a boron-coated GEM. Chinese Physics C, 2011, 35(7): 668-674. doi: 10.1088/1674-1137/35/7/012
[5]	QI Hui-Rong , LI Yu-Lan , LI Jin , GAO Yuan-Ning , LI Yuan-Jing . Study on the TU gas for the GEM-TPC detector. Chinese Physics C, 2009, 33(4): 289-291. doi: 10.1088/1674-1137/33/4/010
[6]	ZHOU Yi , LI Cheng . Research on the delay-line readout for GEM detectors. Chinese Physics C, 2008, 32(S2): 232-234.
[7]	QI Hui-Rong , LI Yuan-Jing , LI Yu-Lan , LI Jin . Investigation of Gas attachment with GEM-TPC detector. Chinese Physics C, 2008, 32(S2): 229-231.
[8]	WEI Su-Min , ZHANG Tian-Jue , XING Jian-Sheng , LI Zhen-Guo , CHU Cheng-Jie , WU Long-Cheng , JIA Xian-Lu , PAN Gao-Feng , GE Tao , XIE Huai-Dong , LÜ Yin-Long , HOU Shi-Gang , GUAN Feng-Ping , AN Shi-Zhong , ZHONG Jun-Qing , YANG Jian-Jun , YAO Hong-Juan . Beam Line Design and Construction of Gas Target for a 30MeV Medical Cyclotron. Chinese Physics C, 2008, 32(S1): 77-79.
[9]	LI Yu-Lan , KANG Ke-Jun , LI Jin , LAI Yong-Fang . The Discussion on Time Projection Chamber (TPC) Based upon GEM Detector. Chinese Physics C, 2007, 31(2): 223-227.
[10]	CAO Liang-Jun , LI Yu-Lan , LAI Yong-Fang , LI Jin , LI Yuan-Jing . Study of Gas Properties for GEM-Based TPC. Chinese Physics C, 2007, 31(5): 475-480.
[11]	LAI Yong-Fang , LI Yu-Lan , LI Yuan-Jing , LI Jin , ZHENG Xiao-Cui , CAO Liang-Jun . Experimental Study on the Performance of Tri-GEM Gas Detector. Chinese Physics C, 2006, 30(8): 767-770.
[12]	LI Da-Peng , HU Shu-Xin , MAI Zhen-Hong , LI Ming . Effect of Alamethicin on the Structure of Lipid Bilayers. Chinese Physics C, 2005, 29(S1): 1-3.
[13]	ZHOU Yi , LI Cheng , AN Shao-Hui , XU Zi-Zong . Three Dimension Distribution of Electric Field in GEM Gas Detectors. Chinese Physics C, 2004, 28(3): 299-303.
[14]	ZHAO Feng-Li , ZHAO Yan-Ping , LIU Jin-Tong . A New Type of Detuning System of RF Compressors (SLED). Chinese Physics C, 2004, 28(11): 1227-1230.
[15]	AN Shao-Hui , LI Cheng , XU Zi-Zong , SUN Yong-Jie , ZHOU Yi . Gain Performance of GEM Gas Detector. Chinese Physics C, 2004, 28(4): 412-416.
[16]	Chen Pengfei , Zhang Mingchao , Li Xinmin , Wang Yuhong . Research and Design of Electron Gun of Electrocurtain. Chinese Physics C, 1998, 22(6): 564-569.
[17]	Yu Zhongqiang , Wang Shunshin , Wei Hornjer , Chu Minglee , Teng Pingkun . Study of the Micro Strip Gas Chamber. Chinese Physics C, 1996, 20(8): 678-684.
[18]	CHEN Zhi-Cheng , LIU Jian-Yang , XU Jian-Ming . THE INVESTIGATION OF AN UNDULATOR FOR THE HEFEI 800MeV ELECTRON STORAGE RING. Chinese Physics C, 1986, 10(3): 316-322.
[19]	REN Wen-Bin , LI Guang-Lin , YAN Bin-Shan . ENERGY DOUBLER. Chinese Physics C, 1985, 9(3): 313-320.
[20]	LI Guang-Lin , REN Wen-Bin , YAN Bin-Shan . ANALYSIS AND CALCULATION OF THE ENERGY DOUBLER USED FOR TRAVELING WAVE CONSTANT IMPEDANCE ACCELERATING STRUCTURE. Chinese Physics C, 1984, 8(1): 125-128.

Access

Get Citation

YI Fu-Ting, LUO Liang, ZHANG Ju-Fang, CHEN Yuan-Bai, XIE Yi-Gang and XIE Wan. Structure Fabrication of PI Film for GEM Detector[J]. Chinese Physics C, 2007, 31(10): 929-932.

YI Fu-Ting, LUO Liang, ZHANG Ju-Fang, CHEN Yuan-Bai, XIE Yi-Gang and XIE Wan. Structure Fabrication of PI Film for GEM Detector[J]. Chinese Physics C, 2007, 31(10): 929-932. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2006-12-03
Revised: 2006-12-19

Article Metric

Article Views(3095)
PDF Downloads(711)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Structure Fabrication of PI Film for GEM Detector

Corresponding author: LUO Liang,

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China2 Graduate University of Chinese Academy of Sciences, Beijing 100049, China

Received Date: 2006-12-03

Accepted Date: 2006-12-19

Available Online: 2007-10-05

Abstract: GEM, which has rapidly been developed in recent years as a new type of gas detector, has advantages of high position resolution and counting rate with a wide potential application in particle physics and X-ray imaging and etc. One of the key techniques of GEM's development is the structure fabrication of the PI film for the detector, which is difficult to be done by the lithography process. In this paper we present the structure fabrication process of GEM's PI film, and the result of our work about it. We chose wet-etching and dry-etching to make the structure holes of PI film, and find that wet-etching is better way to get perfect holes of GEM's PI film for future application with acceptable price. The successful fabrication of GEM's film structures is helpful to develop the domestic research of GEM detector. The performance of the GEM detector with such PI film still need more detail study.

HTML

Reference (1)

Structure Fabrication of PI Film for GEM Detector

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article