High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE

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ZHAI Zhang-Yin, WU Xiao-Shan and JIA Quan-Jie. High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE[J]. Chinese Physics C, 2009, 33(11): 949-953. doi: 10.1088/1674-1137/33/11/004
ZHAI Zhang-Yin, WU Xiao-Shan and JIA Quan-Jie. High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE[J]. Chinese Physics C, 2009, 33(11): 949-953.  doi: 10.1088/1674-1137/33/11/004 shu
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Received: 2008-12-17
Revised: 2009-04-02
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High resolution X-ray diffraction investigation of epitaxially grown SrTiO3 thin films by laser-MBE

    Corresponding author: WU Xiao-Shan,

Abstract: 

SrTiO3 thin films are epitaxially grown on DyScO3, LaAlO3 substrates with/without buffer layers of DyScO3 and SrRuO3 using laser-MBE. X-ray diffraction methods, such as high resolution X-ray diffraction, grazing incident X-ray diffraction, and reciprocal space mapping are used to investigate the lattice structure, dislocation density, in-plane lattice strain distribution along film thickness. From the measurement results, the effects of substrate on film lattice quality and microstructure are discussed.

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